| US 7,591,613 B2 | ||
| Method and apparatus for transporting a substrate using non-newtonian fluid | ||
| John M. de Larios, Palo Alto, Calif. (US); Mike Ravkin, Sunnyvale, Calif. (US); John Parks, Hercules, Calif. (US); Mikhail Korolik, San Jose, Calif. (US); and Fred C. Redeker, Fremont, Calif. (US) | ||
| Assigned to Lam Research Corporation, Fremont, Calif. (US) | ||
| Filed on Jul. 15, 2008, as Appl. No. 12/173,661. | ||
| Application 12/173661 is a division of application No. 11/154129, filed on Jun. 15, 2005, granted, now 7,416,370. | ||
| Prior Publication US 2008/0267721 A1, Oct. 30, 2008 | ||
| Int. Cl. B65G 51/16 (2006.01) | ||
| U.S. Cl. 406—27 [406/26; 406/146] | 13 Claims |
| 1. An apparatus, comprising:
a chamber having a cavity in a form of a conduit, the conduit being configured to convey a non-Newtonian fluid to enable transport
of a substrate through the conduit;
an input port in a wall of the chamber, the input port being configured to port the non-Newtonian fluid into the chamber;
wherein the chamber has an input end and an output end, the input end defining a first opening capable of receiving the substrate,
the output end defining a second opening capable of outputting the substrate, a holding pin within the chamber that is proximate
to the second opening, the holding pin being configured to receive an edge of the substrate to prevent movement of the substrate
while conveying the non-Newtonian fluid.
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