| US 7,584,662 B2 | ||
| Electrostatic-capacity-type acceleration sensor and acceleration measuring device therewith | ||
| Tamito Suzuki, Shizuoka-Ken (Japan) | ||
| Assigned to Yamaha Corporation, Shizuoka-Ken (Japan) | ||
| Filed on May 17, 2007, as Appl. No. 11/798,899. | ||
| Application 11/210966 is a division of application No. 10/790440, filed on Mar. 01, 2004, granted, now 7,004,027. | ||
| Application 11/798899 is a continuation of application No. 11/210966, filed on Aug. 25, 2005, granted, now 7,434,463. | ||
| Claims priority of application No. 2003-55562 (JP), filed on Mar. 03, 2003. | ||
| Prior Publication US 2007/0220975 A1, Sep. 27, 2007 | ||
| This patent is subject to a terminal disclaimer. | ||
| Int. Cl. G01P 15/125 (2006.01) | ||
| U.S. Cl. 73—514.32 | 7 Claims |
| 1. An electrostatic-capacity-type acceleration sensor comprising:
a support member fixed at a prescribed position of a substrate;
a moving member that is supported by the support member;
a first moving electrode and a second moving electrode, which are fixed to the moving member;
a first fixed electrode arranged to face with the first moving electrode; and
a second fixed electrode arranged to face with the second moving electrode,
wherein an overlap value (L1) representing a length of overlap between the first moving electrode and the first fixed electrode when an input acceleration
is zero is less than an overlap value (L2) representing a length of overlap between the second moving electrode and the second fixed electrode when the input acceleration
is zero.
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