| US 7,579,780 B2 | ||
| Power supply apparatus | ||
| Taichiro Tamida, Tokyo (Japan); Takafumi Nakagawa, Tokyo (Japan); Ikuro Suga, Tokyo (Japan); Hiroyuki Osuga, Tokyo (Japan); and Toshiyuki Ozaki, Tokyo (Japan) | ||
| Assigned to Mitsubishi Electric Corporation, Tokyo (Japan) | ||
| Filed on Oct. 02, 2007, as Appl. No. 11/866,062. | ||
| Claims priority of application No. 2006-272858 (JP), filed on Oct. 04, 2006. | ||
| Prior Publication US 2008/0246405 A1, Oct. 09, 2008 | ||
| Int. Cl. H05B 31/26 (2006.01) | ||
| U.S. Cl. 315—111.81 [315/111.41; 315/111.61] | 4 Claims |
| 1. A power supply apparatus for controlling an ion accelerator that includes an anode electrode, a gas flow rate regulator
and a magnetic field generating coil, the power supply apparatus comprising:
a controller configured to control: an anode voltage applied to the anode electrode; a gas flow rate of gas flowing through
the gas flow rate regulator; and magnetic flux density at an ion exit of the ion accelerator by controlling coil current flowing
through the magnetic field generating coil, thereby adjusting magnitude of ion acceleration in the ion accelerator,
wherein, based on: a sectional area of the ion exit of the ion accelerator; an ion accelerating region length of the ion accelerator;
and a magnetic flux bias ratio indicating a ratio of the magnetic flux density at the ion exit to an average value of the
magnetic flux density in an ion accelerating direction of the ion accelerator, the controller controls the anode voltage,
the gas flow rate and the magnetic flux density at the ion exit that depends on the coil current, in order to satisfy a formula
given as follows:
 S: sectional area of the ion exit [m2];
d: ion accelerating region length [m];
β: magnetic flux bias ratio;
Va: anode voltage [V];
Q: gas flow rate [sccm]; and
B: magnetic flux density at the ion exit [T].
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