US 7,579,757 B2
Method and micro power generator for generating electrical power from low frequency vibrational energy
Haluk Kulah, Ankara (Turkey); and Khalil Najafi, Ann Arbor, Mich. (US)
Assigned to The Regents Of The University Of Michigan, Ann Arbor, Mich. (US)
Appl. No. 10/597,321
PCT Filed Jan. 21, 2005, PCT No. PCT/US2005/001974
§ 371(c)(1), (2), (4) Date Mar. 19, 2007,
PCT Pub. No. WO2005/069959, PCT Pub. Date Aug. 04, 2005.
Claims priority of provisional application 60/537821, filed on Jan. 21, 2004.
Prior Publication US 2008/0136562 A1, Jun. 12, 2008
Int. Cl. H01L 41/113 (2006.01)
U.S. Cl. 310—339 15 Claims
OG exemplary drawing
 
1. A method for generating electrical power from low frequency, vibrational energy, the method comprising:
receiving vibrational energy having a low frequency wherein the step of receiving includes the step of providing a micromechanical first resonator device, the first resonator device resonating in response to the received vibrational energy and including an element which is supported to vibrate inertially at a low frequency by inertial forces;
converting the low frequency, vibrational energy to vibrational energy having a high frequency greater than the low frequency wherein the step of converting includes the step of providing a micromechanical second resonator device, the second resonator device resonating at the high frequency greater than the low frequency in response to the resonating first resonator device wherein the second resonator device has a mechanical spring force;
generating a magnetic force between the devices wherein the magnetic force between the devices is larger than the spring force at a catch point at which the second resonator device is magnetically pulled towards the vibrating element; and
converting the high frequency, vibrational energy to electrical power wherein the step of converting the high frequency, vibrational energy is performed electromagnetically.