| US 7,578,187 B2 | ||
| Vibrating gyroscopic sensor and method of adjusting vibrating gyroscopic sensor | ||
| Kazuo Takahashi, Miyagi (Japan); Teruo Inaguma, Miyagi (Japan); Manabu Aizawa, Miyagi (Japan); Koji Suzuki, Miyagi (Japan); Shin Sasaki, Miyagi (Japan); and Eiji Nakashio, Miyagi (Japan) | ||
| Assigned to Sony Corporation, Tokyo (Japan) | ||
| Filed on Dec. 05, 2007, as Appl. No. 11/950,725. | ||
| Application 11/950725 is a continuation of application No. 11/368153, filed on Mar. 03, 2006, granted, now 7,325,452. | ||
| Claims priority of application No. 2005-106717 (JP), filed on Mar. 04, 2005; application No. 2005-176870 (JP), filed on Jun. 16, 2005; application No. 2005-176871 (JP), filed on Jun. 16, 2005; and application No. 2005-380330 (JP), filed on Dec. 28, 2005. | ||
| Prior Publication US 2008/0083278 A1, Apr. 10, 2008 | ||
| Int. Cl. G01P 3/00 (2006.01); G01P 9/00 (2006.01) | ||
| U.S. Cl. 73—504.12 [73/504.15] | 48 Claims |
| 1. A vibrating gyroscopic sensor element comprising:
a cantilever vibrator;
at least one first depression on the cantilever vibrator;
at least one second depression on the cantilever vibrator; and
a pair of detection electrodes provided on the vibrator,
wherein,
the cantilever vibrator projects from a base area of the vibrating gyroscopic sensor element,
the first depression is effective to adjust the frequency difference between a vertical resonance frequency and a horizontal
resonance frequency of the vibrator, and
the second depression is effective to adjust a differential signal generated from the detection electrodes.
|