US 7,573,130 B1
Crack trapping and arrest in thin film structures
Thomas M Shaw, Peeskill, N.Y. (US); Michael W Lane, Cortland Manor, N.Y. (US); Xio Hu Liu, Briarcliff Manor, N.Y. (US); Griselda Bonilla, Fishkill, N.Y. (US); James P Doyle, Bronx, N.Y. (US); Howard S Landis, Underhill, Vt. (US); and Eric G Liniger, Sandy Hook, Conn. (US)
Assigned to Internatonal Business Machines Corporation, Armonk, N.Y. (US)
Filed on Jan. 22, 2009, as Appl. No. 12/357,721.
Application 12/357721 is a continuation of application No. 12/060937, filed on Apr. 02, 2008, granted, now 7,491,578.
Int. Cl. H01L 23/44 (2006.01)
U.S. Cl. 257—688  [257/689; 257/619; 257/620; 257/E21.476] 1 Claim
OG exemplary drawing
 
1. A robust integrated circuit chip comprising:
a centrally located chip active area having a perimeter comprising at least a section of an ultra-low-k dielectric layer; and
a crack trapping structure, the structure arranged around the perimeter of the chip, outside the centrally located active area, and operationally disconnected from the chip active area; wherein the crack trapping structure comprises a via-bar structure sandwiched between two metal plates; wherein the via-bar structure comprises a plurality of walls and a plurality of holes, wherein each wall extends between said two metal plates and is selected from the group consisting of metal walls and ceramic walls; and wherein the via-bar structure does not extend to the end of the metal plates near an edge of the chip, the via-bar structure being recessed from the ends of the metal plates by a distance which is greater than the distance between the two metal plates; whereby a crack generated at the edge of the chip and propagating through the ultra-low-k dielectric layer is substantially completely absorbed by the crack trapping structure.