US 6,298,715 C1 (0089th)
	SCANNING FORCE MICROSCOPE PROBE CANTILEVER WITH REFLECTIVE STRUCTURE
Douglas J. Thomson, Winnipeg, Canada, and Christopher O. Lada, Palo Alto, Calif., assignors to Suss Microtec Test Systems GmbH, Sacka, Germany
Reexamination Request No. 95/000,090, May 2, 2005.
Reexamination Certificate for Patent 6,298,715, issued Oct. 9, 2001, Appl. No. 471,467, Dec. 22, 1999.
Int. Cl. G12B 21/00;21/22;21/02 (2006.01)

U.S. Cl. 73—105

AS A RESULT OF REEXAMINATION, IT HAS BEEN DETERMINED THAT:

Claims 1-23 are cancelled.

New claim 24 is added and determined to be patentable.

24. A scanning force microscope apparatus, comprising: a plurality of probes configured to be positioned in a plurality of positions in close proximity, wherein each of the plurality of probes comprises: a cantilever having a fixed end and a free end; a tip disposed on a front side of the cantilever; and a reflective structure included on a back side of the cantilever such that at least a portion of light that is directed substantially through free space to the cantilever in a first direction having a first directional component from the fixed end to the free end and at least a second directional component from above a back side of the cantilever to the cantilever is reflected from the reflective structure substantially through free space in a second direction having at least a third directional component from the free end to the fixed end; and at least one optical arrangement configured to direct the portion of light to and from the cantilever, wherein the at least one optical arrangement is not located directly above the free end.