US 7,552,018 B1
Method for quickly quantifying the resistance of a thin film as a function of frequency
Aaron D. Lazarus, Baltimore, Md. (US); and Wayne C. Jones, Catonsville, Md. (US)
Assigned to The United States of America as represented by the Secretary of the Navy, Washington, D.C. (US)
Filed on Feb. 12, 2007, as Appl. No. 11/706,679.
Int. Cl. G01R 15/00 (2006.01); G01R 23/16 (2006.01)
U.S. Cl. 702—75  [324/752; 356/432; 428/336; 702/57] 18 Claims
OG exemplary drawing
 
1. A method for determining the resistance of a material layer in accordance with the frequency of electromagnetic radiation impinging thereon, the method comprising:
establishing a reference relationship, said reference relationship being a relationship between a transmission-related parameter and effective resistance, said transmission-related parameter characterizing electromagnetic radiation that passes through a uniformly resistant finitely thin material layer, said effective resistance characterizing said uniformly resistant finitely thin material layer through which said electromagnetic radiation passes, said establishing of a reference relationship including calculating a value of said transmission-related parameter for each of plural values of said effective resistance, wherein said effective resistance is assumed to be equivalent to the theoretical resistance of a uniformly resistant infinitely thin material layer insofar as each value of said effective resistance has associated therewith a value of said transmission-related parameter that is constant regardless of the frequency characterizing said electromagnetic radiation that passes through said uniformly resistant finitely thin material layer;
performing at least one measurement of a value of said transmission-related parameter for a value of the frequency characterizing said electromagnetic radiation that passes through said uniformly resistant finitely thin material layer; and
based on said reference relationship and said at least one measurement, finding at least one solution of a value of said effective resistance for a value of said frequency characterizing said electromagnetic radiation that passes through said uniformly resistant finitely thin material layer.