| US 7,551,344 B2 | ||
| Methods for manufacturing displays | ||
| Nesbitt W. Hagood, Andover, Mass. (US); Jasper Lodewyk Steyn, Winchester, Mass. (US); and Richard S. Payne, Andover, Mass. (US) | ||
| Assigned to Pixtronix, Inc., Andover, Mass. (US) | ||
| Filed on Oct. 01, 2007, as Appl. No. 11/906,542. | ||
| Application 11/906542 is a continuation of application No. 11/251452, filed on Oct. 14, 2005, granted, now 7,304,786. | ||
| Application 11/251452 is a continuation in part of application No. 11/218690, filed on Sep. 02, 2005, granted, now 7,417,782. | ||
| Claims priority of provisional application 60/676053, filed on Apr. 29, 2005. | ||
| Claims priority of provisional application 60/655827, filed on Feb. 23, 2005. | ||
| Prior Publication US 2008/0123175 A1, May 29, 2008 | ||
| Int. Cl. G02B 26/00 (2006.01); H01L 21/00 (2006.01) | ||
| U.S. Cl. 359—290 [438/29] | 20 Claims |
| 1. A method of manufacturing a display device comprising:
forming a plurality of thin-film components;
forming a plurality of mechanical light modulators on top of the thin-film components, wherein
the plurality of mechanical light modulators include a layer of amorphous silicon,
the plurality of mechanical light modulators comprise a plurality of light modulating shutter assemblies, and
the layer of amorphous silicon is etched to form movable shutters.
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