US 7,550,811 B2
Image pickup device and method of manufacturing the same
Hiroya Kobayashi, Hamamatsu (Japan); and Masaharu Muramatsu, Hamamatsu (Japan)
Assigned to Hamamatsu Photonics K.K., Hamamatsu-shi, Shizuoka (Japan)
Appl. No. 10/530,754
PCT Filed Oct. 08, 2003, PCT No. PCT/JP03/12911
§ 371(c)(1), (2), (4) Date Feb. 03, 2006,
PCT Pub. No. WO2004/034471, PCT Pub. Date Apr. 22, 2004.
Claims priority of application No. 2002-296543 (JP), filed on Oct. 09, 2002.
Prior Publication US 2006/0240586 A1, Oct. 26, 2006
Int. Cl. H01L 21/00 (2006.01)
U.S. Cl. 257—431  [257/432; 257/E31.127] 2 Claims
OG exemplary drawing
 
1. An image pickup device comprising:
a semiconductor substrate having a back surface, serving as a light-incident surface, and a front surface, opposing the back surface and being provided with a charge reading part constituted by a charge coupled device that detects light propagating from the back surface, said semiconductor substrate having a structure such that the thickness of the region at which said charge reading part is disposed is made thinner than the thickness of the remaining region;
a package having a cavity that houses said semiconductor substrate and that is fixed with said semiconductor substrate while the front surface of said semiconductor substrate faces a bottom part of said cavity;
a fiber optic plate having a light outgoing end surface joined to the back surface of said semiconductor substrate while at least a part thereof is housed in said cavity of said package;
a cover covering an upper opening of said cavity of said package, said cover having a guiding opening for inserting at least the part of said fiber optic plate into said cavity; and
electrical wirings for taking out charge signals output from said charge reading part to the exterior of said package, said electrical wirings including substrate-side electrodes disposed on the front surface of said semiconductor substrate, package-side wirings disposed on the bottom surface of said cavity and being electrically connected to said substrate-side electrodes via bumps disposed on said substrate-side electrodes, and package-side electrodes disposed on an inner wall of said cavity and being electrically connected to said package-side wirings by bonding wires.